A Back-illuminated Megapixel Cmos Image Sensor
نویسندگان
چکیده
Imaging with a back-illuminated CMOS imager provides a number of advantages, especially as the pixel size is reduced. These advantages include high (1 00%) fill-factor and increased quantum efficiency, efficient implementation of antireflection coatings, improved angular response, availability of the traditional “frontside” of the pixel to incorporate in-pixel processing circuits, and increased compatibility with the next generation metals (e.g Cu) and low-k dielectrics.
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